TM Grating Coupler on Low-Loss LPCVD based Si3N4 Waveguide Platform
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چکیده
We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM polarization is a pre-requisite. The proposed GC and the 360 nm × 800 nm strip based Si3N4 waveguides have been fabricated by optical projection lithography using an i-line stepper tool enabling low-cost and mass manufacturing of photonic-integrated-circuits.
منابع مشابه
1 1 TM Grating Coupler on Low - Loss 2 LPCVD based Si 3 N 4 Waveguide Platform 3
We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss 12 Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling 13 loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM 14 polarization is a pre-requisite. The proposed GC and the 360 nm × 800 nm strip based Si3N4 15 waveguides...
متن کاملTM Grating Couplers for Low-Loss LPCVD based Si3N4 Waveguide Platform
We demonstrate TM grating couplers for LPCVD silicon nitride platform with coupling loss of 6.5dB at 1541nm and 1dB bandwidth of 55nm employing optical projection lithography for low-cost and mass manufacturing of photonic integrated circuits. OCIS codes: (350.2770) Gratings; (250.5300) Photonic integrated circuits
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تاریخ انتشار 2018